Corro, Pablo G. del (2017) Sistema de fabricación de nano-estructuras basado en MEMS. / MEMS-based nano-structures fabrication system. Tesis Doctoral en Ciencias de la Ingeniería, Universidad Nacional de Cuyo, Instituto Balseiro.
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Resumen en español
Esta tesis de doctorado fue desarrollada en el marco de un proyecto de colaboración entre el Instituto Balseiro, la Universidad de Boston (U.S.A) y Lucent-Alcatel (U.S.A), denominado proyecto Atomic Calligraphy el cual plantea la construcción sistema de impresión 3D de nano-estructuras usando dispositivos micro-electro mecánicos (MEMS). Dicho sistema esta basado en el principio funcionamiento de un sistema de evaporación térmica convencional. El proyecto Atomic Calligraphy propone reemplazar las piezas fundamentales de un evaporador térmico convencional como las canastas de tungsteno por un MEMS al que se nombró micro-fuente de evaporación térmica, el sensor de espesor por un MEMS al que se llamó micro-sensor de espesor y la máscara litografía por un MEMS al que se llamó escritor. El escritor se comporta como un esténcil dinámico - como una máscara de litografía móvil - y es actuado usando unos actuadores electrostáticos llamados comb drives. El aporte de este trabajo de tesis al proyecto Atomic Calligraphy se focalizó en la optimización de la respuesta mecánica de los comb drives y en la implementación de un sistema detección capacitiva del desplazamiento del esténcil dinámico. En particular respecto al funcionamiento de los comb drives se muestra que es posible, usando solo consideraciones del diseño, reducir significativamente el efecto de levitación presente en estos dispositivos fabricados con técnicas de litografía/etching convencionales. Para el sistema de detección capacitiva construido, se aprovecha la simetría del MEMS escritor para implementar dos puentes capacitivos con excitación balanceada de los cuales se puede obtener la información del desplazamiento espacial del esténcil dinámico en tiempo real. Los MEMS diseñados para este proyecto fueron fabricados usando el proceso multiusuario PolyMUMPs que ofrece la empresa MEMSCAP.
Resumen en inglés
This P.h.D thesis took place in a collaborative project between Balseiro Institute (AR), Boston University (U.S.A.) and Lucent-Alcatel (U.S.A.) called Atomic Calligraphy in which the construction of a 3D printing system of nano-structures using MEMS (micro-electro mechanical systems) devices is proposed. Such a system is based on the operating principle of a conventional thermal evaporator. The Atomic Calligraphy project proposes to replace essential parts of the conventional thermal evaporator as the evaporation boats for a MEMS device referred to as micro thermal evaporation sources, the thickness monitor sensor for a MEMS device referred to as micro thickness monitor sensor, and the shutter and the lithography mask for a MEMS device referred to as writer. The writer behaves as a dynamic stencil -or mobile lithography mask - and is actuated using electrostatic actuators called comb drives. The contribution of this work to the Atomic Calligraphy project was focused on the comb drives mechanical response optimization and on the implementation of a capacitive detection system of the dynamic stencil displacement. Specifically, regarding to the comb drives operation we prove that, using design considerations only, is possible to reduce significantly the levitation effect present on this type of devices fabricated using conventional lithography/etching techniques. Regarding to the build capacitive detection system, the MEMS writer symmetry was utilized to implement two capacitive bridges with balanced excitation from which it is possible to get information of the dynamic stencil spatial displacement. The designed MEMS devices for this project were fabricated using the PolyMUMPs multi-user process offered by MEMSCAP company.
| Tipo de objeto: | Tesis (Tesis Doctoral en Ciencias de la Ingeniería) |
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| Palabras Clave: | [Micro-electromechanical systems; Sistemas micro-electromecánicos; Comb drives; Nano-fabrication; Nano-fabricación; Capacitive sensing; Sensado capacitivo; Dynamics stencil; Estencil dinámico; Thermal evaporation; Evaporación térmica ] |
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| Materias: | Física > Nanotecnología |
| Divisiones: | Gcia. de área de Investigación y aplicaciones no nucleares > Gcia. de Física > Materia condensada > Bajas temperaturas |
| Código ID: | 862 |
| Depositado Por: | Tamara Cárcamo |
| Depositado En: | 19 Feb 2021 10:14 |
| Última Modificación: | 19 Feb 2021 10:14 |
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